Materials and Fabrication

Materials and Fabrication

DTU Nanotech has a strong track record within synthesis and characterisation of micro- and nanosystems and we are the main users of the state-of-the-art cleanroom facility at DTU Danchip. We engage in many collaboration projects for pre-production prototypes based on silicon and polymer micro- and nanofabrication. Beyond the well-established silicon and polymer platforms, we also explore new materials such as graphene.


Research areas:

Explorative materials research

Explorative materials research
We have extended the materials base for synthesis of micro- and nanosystems with conducting polymers, pyrolised photoresist electrodes, block co-polymers, biocompatible and biodegradable materials, and we also use chemical surface functionalisation. A large research activity is related to the fabrication and engineering of 2-dimensional (2D) crystals such as graphene
and hexagonal boron nitride (hBN). Our methods include techniques for growth, transfer, lithographic patterning and characterisation of graphene films grown by chemical vapour deposition.

Silicon micro- and nanofabrication

Silicon micro and nanofabrication
Micro- and nanofabrication of silicon (Si) wafers is a key competence at the department.
As fabrication methods, we use photo-lithography down to 2 μm, deep UV lithography down to 300 nm, and electron beam lithography (EBL) down to 20 nm linewidths. These methods can be combined with a range of wet and dry etching and deposition techniques. We use the Si fabrication platform for MEMS applications such as the so-called capacitive micromachined ultrasonic transducers, and for microreactors for catalytic activity. Moreover, the Si platform is used for a wide range of sensor applications and for the master origination in polymer replication techniques.

Polymer micro- and nanofabrication

Polymer micro and nanofabrication
The polymer micro- and nanofabrication methods follow a process flow where master origination is done either by traditional micromachining or by origination from planar silicon masters through nickel electroforming.
Our methods comprise nanoimprint lithography, hot embossing and injection molding of curved shapes, and roll-to-roll extrusion coating. The application areas are within lab-on-chip systems, where we have developed a number of standard tool formats for injection molding, within drug delivery systems, and within functional surface effects such as surface wetting properties, colour effects, and metasurfaces exhibiting plasmonic colours.


Rafael J. Taboryski
DTU Nanotech
45 25 81 01
Anders Kristensen
DTU Nanotech
45 25 63 31
24 OKTOBER 2017