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Imaging Nanoelectronics Live by Transmission Electron Microscopy
By developing special microfabricated chip systems that fit into a transmission electron microscope (TEM), we have opened up new windows to follow molecular scale processes in nanoelectronic devices. This project aims at using these novel tools in a detailed study of silicon nanowire device formation and nanowire device modifications to achieve a better understanding of the essential factors of nanowire dimension, surface functionalization, and contact structure in functional nanowire devices that can be created, chemically modified, operated, and characterized in-situ TEM.
Project details
Funded by The Danish Council for Independent Research | Technology and Production Sciences Case No 10-083797
Project period: 1. marts 2011 - 28. februar 2014.
Funding: 5.7 Mill dkk.
Danish Summary
Nanostrukturer kan i dag laves med en præcision på atomart niveau, hvilket giver fantastiske muligheder for at designe bedre elektroniske komponenter, som for eksempel sensorer og transistorer.
Dette projekts formål er at udvikle en teknologisk platform, hvormed nanostrukturer kan karakteriseres i real-time på atomar skala som aktive komponenter i nanosystemer inde i et transmissions elektron mikroskop (TEM). På DTUs Center for Elektron Nanoskopi med verdensklasse mikroskopi udstyr har vi en enestående mulighed for at udvikle denne platform. Baseret på erfaringer fra et successfuldt hvor vi har demonstreret at teknikken er mulig, vil vi nu udvikle specielle TEM-kompatible mikrochips med bjælker eller tynd-film membraner, hvorpå nano-komponenter bliver integreret. Via TEM-observationerne kan vi undersøge struktur, overflade og virkemåde samtidigt, hvilket er afgørende nødvendigt for at skabe brugbare nanokomponenter til fremtidens elektronik i f.eks. sensorer og solceller. Et stærkt, internationalt team af forskere vil bidrage med deres ekspertise til projektet og udforskningen af videre industrielle anvendelsesmuligheder for den udviklede teknologi.
Collaborators
- Frances Ross, Manager, Nanoscale Materials Analysis Department, IBM T. J. Watson Research Center Yorktown Heights, NY, USA
- Rafal Dunin-Borkowski, Director, Institute for Microstructure Research Director, Ernst Ruska-Centre for Microscopy and Spectroscopy with Electrons Peter Gruenberg Institute Research Centre Juelich
- Peter Bøggild, Associate Professor, Dept of micro and nanotechnology, Technical University of Denmark
- Ole Hansen, Associate Professor, Dept of micro and nanotechnology, Technical University of Denmark
- Andrew Burrows, Director, Center for Electron Nanoscopy DTU-CEN
People working on this project
- Sardar Bilal Alam, PhD student
- Kristian Mølhave, Project leader
Students involved
- Andreas Nilausen: BSc project on silicon based microheaters for TEM chips
- Lean Gottlieb: MSc project on silicon nanowire sensors
Project Progress
- 2012 july Experiments in progress at IBM the coming 6 months
- 2012 july TEM holder with electrical contacts constructed and being tested
- 2012 june: Experiments planned for visit at IBM
- 2012 may: Silicon microcantilever chips fabricated in the Danchip cleanroom ready for experiments
- 2011 march: Sardar Bilal hired as PhD student
Publications and dissemination
Past Publications in the field
[1] C. Kallesoe et al., «Integration, gap formation, and sharpening of III-V heterostructure nanowires by selective etching», Journal of Vacuum Science & Technology B, bd. 28, nr. 1, s. 21-26, Jan. 2010.
[2] C. Kallesoe, K. Molhave, T. Martensson, T. Hansen, L. Samuelson, og P. Boggild, «Selective etching of III-V nanowires for molecular junctions», Microelectronic Engineering, bd. 85, nr. 5-6, s. 1179-1181, Jun. 2008.
[3] C. Kallesøe, C.-Y. Wen, K. Mølhave, P. Bøggild, og F. M. Ross, «Measurement of Local Si-Nanowire Growth Kinetics Using In situ Transmission Electron Microscopy of Heated Cantilevers», Small, bd. 6, nr. 18, s. 2058-2064, 2010.
[4] K. Molhave, S. Gudnason, A. Pedersen, C. Clausen, A. Horsewell, og P. Boggild, «Electron irradiation-induced destruction of carbon nanotubes in electron microscopes», Ultramicroscopy, bd. 108, nr. 1, s. 52-57, Dec. 2007.
[5] K. Molhave, S. B. Gudnason, A. T. Pedersen, C. H. Clausen, A. Horsewell, og P. Boggild, «Transmission electron microscopy study of individual carbon nanotube breakdown caused by Joule heating in air», Nano Letters, bd. 6, nr. 8, s. 1663-1668, 2006.
Sidst opdateret 04.03.2013 Ansvarlig:
Peter Bøggild
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