This page contains a list of different publications from the MEMS-AppliedSensors group. Most publications are available as pdf-documents. Master and bachelor thesis are also available for download from our student projects archive.
Recent Journal articles (2004-)
J. Richter, J. Pedersen, M. Brandbyge, E.V. Thomsen, O. Hansen
Piezoresistance in p-type silicon revisited
Journal of Applied Physics, Vol. 104 (2008)
A. Hyldgård, D. Mortensen, K. Birkelund, O. Hansen, E.V. Thomsen
Autonomous multi-sensor micro-system for measurement of ocean water salinity
Sensors & Actuators A, Vol. 147, pp. 474-484 (2008)
A. Hyldgård, K. Birkelund, J. Janting, E.V. Thomsen
Direct media exposure of MEMS multi-sensor systems using a potted-tube packaging concept
Sensors & Actuators A, Vol. 142 pp. 398-404 (2008)
R. Lou-Moeller, C.C. Hindrichsen, L.H. Thamdrup, T. Bove, E. Ringgaard, A.F. Pedersen, Erik V. Thomsen
Screen-Printed Piezoceramic Thick Films for Miniaturised Devices
Journal of Electroceramics, Vol. 19, Issue 4, pp. 333-338 (2007)
C. Pedersen, S. T. Jespersen, K. W. Jacobsen, J. P. Krog, C. Christensen, E. V. Thomsen
Relative media pressure compensation technique using rectangular diaphragms
Sensors & Actuators, Vol. 132, Issue 2, pp. 664-676 (2006)
J. Richter, O. Hansen, A. Nylandsted Larsen, J. Lundsgaard Hansen, G. F. Eriksen, E. V. Thomsen
Piezoresistance of Silicon and Strained Si0.9Ge0.1
Sensors and Actuators A, Vol 123-124C pp. 388-396 (2005)
C. Pedersen, S. T. Jespersen, J. P. Krog, C. Christensen and E. V. Thomsen
Combined Differential and Static Pressure Sensor based on a Double-Bridged Structure
IEEE Sensors Journal, Vol. 5, Issue 3, Page 446-454, 2005
C. Pedersen, S. T. Jespersen, K. W. Jacobsen, J. P. Krog, C. Christensen, E. V. Thomsen,
Highly Reliable O-ring Packaging Concept for MEMS Pressure Sensors
Sensors and Actuators A 115 (2004) 617-627
C. Bergenstof Nielsen, C. Christensen, C. Pedersen and E. V. Thomsen,
Particle Precipitation in connection with KOH etching of Silicon
Journal of the Electrochemical Society, 151 (5), pp. G338-42 (2004).
Conference Papers (2003-)
A.U. Andreassen, A. Hyldgård, S. Petersen, E.V. Thomsen, J. Nielsen and J.M. Aaslyng
MOVING TOWARDS THE USE OF NEW MICRO TECHNOLOGY (MEMS) IN GREENHOUSE CLIMATE RELATED SENSING
proceedings of the IHC Seoul 2006
Hindrichsen, C C; Lau-Moeller, R; Bove, T; Thomsen, E V
MEMS acceleroemeter with screen printed thick film PZT
proceedings of the XX Eurosensors, ISBN 91-631-9281-0, 2006
Pedersen, T; Hansen, O; Thomsen, E V
Corrosion resistant capacitive pressure sensor
proceedings of the XX Eurosensors, ISBN 91-631-9281-0, 2006
Hyldgård, A; Birkelund, K; Janting, J; Thomsen, E V
Direct exposure of MEMS multi-sensor systems using a potted-tube packaging concept
proceedings of the XX Eurosensors, ISBN 91-631-9281-0, 2006
Thomsen, E V; Hyldgard, A; Birkelund, K; Haahr, R G; Duun, S
Distributed sensors: Applications, Fabrication and Challenges
proceedings of the XX Eurosensors, ISBN 91-631-9281-0, 2006
Arnoldus, M B; Richter, J ; Hedegaard, T; Olesen, M; Thomsen, E V
Determination of piezoresistive properties of silicon and strained silicon germanium
proceedings of the XX Eurosensors, ISBN 91-631-9281-0, 2006
A. Hyldgård, Í. Ólafsdóttir, M. Olesen, T. Hedegaard, O. Hansen & E. V. Thomsen
FISH & CHIPS: Four Electrode Conductivity / Salinity Sensor on a Silicon Multi-sensor chip for Fisheries Research
IEEE Sensors 2005, pp. 1124-1127, (2005), ISBN 0780390563
Thomas Jorgensen, Jens Branebjerg, E. V. Thomsen
RF & MICROPROCESSOR CIRCUITS FOR MEMS SENSOR PACKAGING
Proceedings of the Pan Pacific Microelectronics Symposium, Kauai, Hawaii, January 25-27, 2005
A. Hyldgård, O. Hansen, E. V. Thomsen
FISH & CHIPS: Single Chip Silicon MEMS CTDL Salinity, Temperature, Pressure and Light Sensor fur use in Fisheries Research
MEMS 2005. 18th IEEE International Conference on Micro Electro Mechanical Systems, pp. 303-306, ISBN 0780387325
J. Richter, O. Hansen, A. Nylandsted Larsen, J. Lundsgaard Hansen, G. F. Eriksen, E. V. Thomsen
Piezoresistance of Silicon and Strained Si1-xGex
Technical Digest of Eurosensors XVIII, Rome 12-15 Sep 2004, p.961-964, ISBN 88-7621-282-5
Extended abstract from Eurosensors 2004
C. Pedersen, S. T. Jespersen, J. P. Krog, C. Christensen and E. V. Thomsen
Combined Differential and Relative Pressure Sensor based on a Double-Bridged Structure
IEEE Sensors 2003, Proceedings of IEEE, Vol. 1, pp. 698-703, (2003), ISBN 0780381335
C. Pedersen, S.T. Jespersen, K.W. Jacobsen, J.P. Krog, C. Christensen and E. V. Thomsen
Characterization of MEMS Pressure Sensor Packaging Concept using O-rings as Hermetic Sealing
Eurosensors 2003, Proceedings of 17th European Conference on Solid-State Transducers, (2003), pp. 418-421
C Bergenstof Nielsen, E. V. Thomsen
Rapid prototyping of packaging of a silicon pressure sensor using PMMA and a CO2 laser
Workshop on MEMS Sensor Packaging, ISBN: 87-89935-46-2, Danish Technical University, Lyngby, Denmark (2003)
C. Pedersen, S. T. Jespersen, Kjeld W. Jacobsen, J. P. Krog, C. Christensen, E. V. Thomsen
O-ring clamped Piezoresistive Differential Pressure Sensors
Workshop on MEMS Sensor Packaging, ISBN: 87-89935-46-2, Danish Technical University, Lyngby, Denmark (2003)
C. Bergenstof Nielsen, C. Christensen and E.V. Thomsen
Particle Precipitation in Connection with KOH Etching
Eurosensors 2000, The 14th European Conference on Solid-State Transducers, ISBN 87-89935-50-0, p. 475-477, (2000)
Lecture notes
Bipolar semiconductor devices
E. V. Thomsen
Lecture note from course 33253
Piezoresistive MEMS devices
E. V. Thomsen and J. Richter
Lecture note from course 33253
Recent submitted abstracts
R. Lou-Moeller, C.C. Hindrichsen, L.H. Thamdrup, T. Bove, E. Ringgaard, A.F. Pedersen, Erik V. Thomsen
"Screen-printed piezoceramic thick films for miniaturised devices"
Submitted to:
POLECER International Conference: Piezoceramics for end-users II From electroactive materials to multifunctional integrated devices
J. Richter, O. Hansen, A. Nylandsted Larsen, J. Lundsgaard Hansen, C. Christensen, S.D. Petersen, A. Greve and E.V. Thomsen
"PIEZORESISTANCE IN SILICON AND STRAINED SILICON GERMANIUM"
Abstract submitted for MEMS 2006
A. Hyldgård, Í. Ólafsdóttir, P. Schultz, O. Hansen and E.V. Thomsen
"SINGLE CHIP MULTI-SENSOR AND COMPACT PACKAGING CONCEPT
FOR FISHERIES RESEARCH"
Abstract submitted for MEMS 2006
C. Pedersen, C. Christensen, J. P. Krog, N. Pedersen, P. E. Andersen and E. V. Thomsen
Single Chip Multisensor for Simultaneous Measurements of Flow, Temperature, Differential Pressure and Relative Pressure in Wet Aggressive Media
Abstract submitted to MEMS 2005
Presentations
Combined Differential and Relative Pressure Sensor Based on a Double-Bridged Structure
C. Pedersen , S.T. Jespersen , J.P. Krog , C. Christensen and E.V. Thomsen
Presentation at IEEE Sensors 2003
Characterization of MEMS Pressure Sensor Packaging Concept using O-rings as Hermetic Sealing
C. Pedersen , S.T. Jespersen , K.W. Jacobsen , J.P. Krog , C. Christensen and E.V. Thomsen
Presentation at Eurosensors 2003
O-ring Clamping of Piezoresistive Differential Pressure Sensors
C. Pedersen , S.T. Jespersen , K.W. Jacobsen , J.P. Krog , C. Christensen and E.V. Thomsen
Presentation at the Workshop on MEMS Sensor Packaging 2003
Posters
Piezoresistance in Si and strained Si1-xGex
J. Richter , O. Hansen , A. Nylandsted Larsen , J. L. Hansen , G. F. Eriksen and E. V. Thomsen
Poster presented at the DFS annual meeting 2005, awarded best poster!
Fish & Chips: a multi-sensor for Marine Environment Studies
A. Hyldgård, O. Hansen & E.V. Thomsen
Poster presented at the DTU Gensynsdag 2004
Piezoresistance in Si and strained Si1-xGex
J. Richter , O. Hansen , A. Nylandsted Larsen , J. Lundsgaard Hansen , G. F. Eriksen and E. V. Thomsen
Poster presented at Eurosensors 2004
Piezoresistance in Si and strained Si1-xGex
J. Richter , O. Hansen , A. Nylandsted Larsen , J. L. Hansen , G. F. Eriksen and E. V. Thomsen
Poster presented at the DFS annual meeting 2004